PROBE THEORIES AND APPLICATIONS - MODERN ASPECTS

被引：32

作者：

ALLEN, JE

机构：

[1] Dept. of Eng. Sci., Oxford Univ.

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 1995年 / 4卷 / 02期

关键词：

D O I：

10.1088/0963-0252/4/2/007

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Some aspects of probe theory are reviewed. These are mainly concerned with the collection of positive ions and the range of validity of different theories. Recent developments in experimental techniques, particularly with reference to radio frequency discharges, are also discussed.

引用

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页码：234 / 241

页数：8

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