METALLOORGANIC DECOMPOSITION (MOD) PROCESSING OF FERROELECTRIC AND ELECTROOPTIC FILMS - A REVIEW

被引:100
作者
VEST, RW
机构
[1] Purdue University, W. Lafayette
关键词
electro-optic films; ferroelectric films; MOD processing;
D O I
10.1080/00150199008221465
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The chemistry and physics pertinent to the various steps of MOD processing are discussed, and areas where more basic research is needed are pointed out. The preparation and properties of MOD films of PbTiO3, BaTiO3, Pb(Zr, Ti)O3, (Pb, Sr)TiO3 and (Pb, La)(Zr, Ti)O3 are discussed. © 1990, Taylor & Francis Group, LLC. All rights reserved.
引用
收藏
页码:53 / 68
页数:16
相关论文
共 16 条
  • [1] PREPARATION OF FERROELECTRIC PZT FILMS BY THERMAL-DECOMPOSITION OF ORGANOMETALLIC COMPOUNDS
    FUKUSHIMA, J
    KODAIRA, K
    MATSUSHITA, T
    [J]. JOURNAL OF MATERIALS SCIENCE, 1984, 19 (02) : 595 - 598
  • [2] KUO CY, 1974, ELECTRICAL APPLICATI
  • [3] NOUMURA S, 1955, J PHYS SOC JPN, V10, P108
  • [4] REYNOLDS WW, 1987, J APPL PHYS, V61, P1034
  • [5] SABO CJ, 1985, NOV P INTL SOC HYBR, P59
  • [6] TENG KF, 1987, IEEE T COMPON HYBR, V12, P545
  • [7] Vest G.M., 1986, MATER RES SOC S P, V60, P35
  • [8] VEST GM, 1982, INT J HYBRID MICROEL, V2, P62
  • [9] VEST GM, JPL7185 FIN TECHN RE
  • [10] VEST R, 1986, 6TH P IEEE INT S APP, P374