PREPARATION OF FERROELECTRIC PZT FILMS BY THERMAL-DECOMPOSITION OF ORGANOMETALLIC COMPOUNDS

被引：153

作者：

FUKUSHIMA, J ^{[1
]}

KODAIRA, K ^{[1
]}

MATSUSHITA, T ^{[1
]}

机构：

[1] HOKKAIDO UNIV,FAC ENGN,DEPT APPL CHEM,SAPPORO,HOKKAIDO 060,JAPAN

来源：

JOURNAL OF MATERIALS SCIENCE | 1984年 / 19卷 / 02期

关键词：

D O I：

10.1007/BF02403247

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：595 / 598

页数：4

共 14 条

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FEINSTEIN, LG .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (06) :4406-4411

[2] DEPOSITION OF THIN-FILMS OF PZT BY A FOCUSED ION-BEAM SPUTTERING TECHNIQUE [J].

CASTELLANO, RN .

FERROELECTRICS, 1980, 28 (1-4) :387-390

[3]

CHEN D, 1975, ADA00912

[4]

Fukushima J., 1975, Yogyo-Kyokai-Shi, V83, P204, DOI 10.2109/jcersj1950.83.956_204

[5]

Fukushima J., 1975, Yogyo-Kyokai-Shi, V83, P535, DOI 10.2109/jcersj1950.83.963_535

[6]

FUKUSHIMA J, 1976, CERAM B, V55, P1064

[7]

Hamada H., 1979, Oyo Buturi, V48, P602

[8] EPITAXIAL-GROWTH OF FERROELECTRIC PLZT [(PB,LA)(ZR,TI)O3] THIN-FILMS [J].

ISHIDA, M ;

TSUJI, S ;

KIMURA, K ;

MATSUNAMI, H ;

TANAKA, T .

JOURNAL OF CRYSTAL GROWTH, 1978, 45 (01) :393-398

[9] PREPARATION AND PROPERTIES OF FERROELECTRIC PLZT THIN-FILMS BY RF SPUTTERING [J].

ISHIDA, M ;

MATSUNAMI, H ;

TANAKA, T .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) :951-953

[10] FORMATION PROCESS OF ANTIMONY-DOPED STANNIC OXIDE FILM FROM ORGANOMETALLIC COMPOUNDS BY THERMAL-DECOMPOSITION [J].

MATSUSHITA, T ;

SEKIYA, T ;

YAMAI, I .

NIPPON KAGAKU KAISHI, 1972, (05) :880-+

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