AN O-18 STUDY OF COOPERATIVE DIFFUSION AND CHEMICAL-REACTION DURING THERMAL TREATMENTS OF SILICA FILMS IN WATER-VAPOR

被引：52

作者：

RIGO, S

ROCHET, F

AGIUS, B

STRABONI, A

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 04期

关键词：

D O I：

10.1149/1.2123990

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：867 / 876

页数：10

共 31 条

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