SURFACE CHARACTERISTICS AND ELECTRICAL CONDUCTION OF BETA-SIC FILMS FORMED BY CHEMICAL CONVERSION

被引：10

作者：

HAQ, KE

KHAN, IH

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1970年 / 7卷 / 04期

关键词：

D O I：

10.1116/1.1315373

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：490 / &

共 7 条

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KHAN, IH
SUMMERGRAD, RN
[J]. APPLIED PHYSICS LETTERS, 1967, 11 (01) : 12 - +
[3] KHAN IH, 1967, J VAC SCI TECHNOL, V4, P327
[4] KHAN IH, 1969, MATER RES B, V4, P285
[5] EPITAXIAL GROWTH OF SIC FILM ON SILICON SUBSTRATE AND ITS CRYSTAL STRUCTURE
NAKASHIMA, H
SUGANO, T
YANAI, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1966, 5 (10) : 874 - +
[6] POSER HZ, 1965, PHYS CHEM, V228, P113
[7] SPITZER HG, 1959, PHYS REV, V113, P133