EPITAXIAL P-TYPE GERMANIUM AND SILICON FILMS BY THE HYDROGEN REDUCTION OF GEBR4, SIBR4, AND BBR3

被引:21
作者
MILLER, KJ
GRIECO, MJ
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D O I
10.1149/1.2425635
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:1252 / 1256
页数:5
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