PYROELECTRIC DETECTION OF ULTRAVIOLET-LASER ABLATION PRODUCTS FROM POLYMERS

被引:38
作者
DYER, PE [1 ]
SRINIVASAN, R [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,DIV RES,YORKTOWN HTS,NY 10598
关键词
D O I
10.1063/1.344227
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:2608 / 2612
页数:5
相关论文
共 29 条
[1]   EXCIMER LASER ETCHING OF POLYIMIDE [J].
BRANNON, JH ;
LANKARD, JR ;
BAISE, AI ;
BURNS, F ;
KAUFMAN, J .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) :2036-2043
[2]  
BROADHURST MG, 1980, SPRINGER TOPICS APPL, V33, pCH5
[3]   LASER-PHOTOETCHING CHARACTERISTICS OF POLYMERS WITH DOPANTS [J].
CHUANG, TJ ;
HIRAOKA, H ;
MODL, A .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 45 (04) :277-288
[4]  
COUFAL H, 1988, SPRINGER TOPICS APPL, V58
[5]   LARGE CARBON CLUSTER ION FORMATION BY LASER ABLATION OF POLYIMIDE AND GRAPHITE [J].
CREASY, WR ;
BRENNA, JT .
CHEMICAL PHYSICS, 1988, 126 (2-3) :453-468
[6]   VELOCITY DISTRIBUTION OF MOLECULAR FRAGMENTS FROM POLYMETHYLMETHACRYLATE IRRADIATED WITH UV LASER-PULSES [J].
DANIELZIK, B ;
FABRICIUS, N ;
ROWEKAMP, M ;
VONDERLINDE, D .
APPLIED PHYSICS LETTERS, 1986, 48 (03) :212-214
[7]   SPECTROSCOPIC STUDIES OF ARF LASER PHOTOABLATION OF PMMA [J].
DAVIS, GM ;
GOWER, MC ;
FOTAKIS, C ;
EFTHIMIOPOULOS, T ;
ARGYRAKIS, P .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 36 (01) :27-30
[8]   EXCIMER LASER ABLATION AND THERMAL COUPLING EFFICIENCY TO POLYMER-FILMS [J].
DYER, PE ;
SIDHU, J .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1420-1422
[9]   SPECTROSCOPIC AND FAST PHOTOGRAPHIC STUDIES OF EXCIMER LASER POLYMER ABLATION [J].
DYER, PE ;
SIDHU, J .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (09) :4657-4663
[10]   MASS SPECTROSCOPIC IDENTIFICATION OF WAVELENGTH DEPENDENT UV LASER PHOTOABLATION FRAGMENTS FROM POLYMETHYLMETHACRYLATE [J].
ESTLER, RC ;
NOGAR, NS .
APPLIED PHYSICS LETTERS, 1986, 49 (18) :1175-1177