OPTICAL-FIBER GEOMETRY - ACCURATE MEASUREMENT OF CLADDING DIAMETER

被引：15

作者：

YOUNG, M

HALE, PD

MECHELS, SE

机构：

[1] Natl Inst of Standards and, Technology, Boulder, CO

来源：

JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | 1993年 / 98卷 / 02期

关键词：

CRITICAL DIMENSIONAL MEASUREMENTS; GRAY SCALE MEASUREMENT; INTERFERENCE MICROSCOPE; MICROMETER; MICROSCOPE; OPTICAL FIBER; OPTICAL FIBER GEOMETRY; SCANNING CONFOCAL MICROSCOPE; STANDARD REFERENCE MATERIAL; VIDEO MICROSCOPE;

D O I：

10.6028/jres.098.015

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have developed three instruments for accurate measurement of optical fiber cladding diameter: a contact micrometer, a scanning confocal microscope, and a white-light interference microscope. Each instrument has an estimated uncertainty (3 standard deviations) of 50 nm or less, but the confocal microscope may display a 20 nm systematic error as well. The micrometer is used to generate Standard Reference Materials that are commercially available.

引用

页码：203 / 216

页数：14

共 19 条

[1]

[Anonymous], 1993, GUIDE EXPRESSION UNC, V98

[2]

[Anonymous], STANDARD REFERENCE M

[3]

BAINES JGN, 1990, J LIGHTWAVE TECHNOL, V8, P1259, DOI 10.1109/50.59149

[4]

COLLYER A, 1990, OPTICAL FIBER MEASUR, P143

[5]

EMIG KA, 1990, NATL I STAND TECHNOL, V792, P135

[6]

HALE PD, 1992, NATL I STAND TECHNOL, V839, P51

[7]

KOMATSU H, INTERFEROMETRY PRINC

[8] VIDEO MICROSCOPE WITH SUBMICROMETER RESOLUTION [J].

MECHELS, S ;

YOUNG, M .

APPLIED OPTICS, 1991, 30 (16) :2202-2211

[9]

MECHELS S, 1992, P SOC PHOTO-OPT INS, V1660, P542, DOI 10.1117/12.59541

[10]

MECHELS S, 1991, P SOC PHTOOPT INSTRU, V1556, P164

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