DIFFUSION-LIMITED INTERACTION OF DISLOCATION LOOPS AND INTERSTITIALS DURING DRY OXIDATION IN SILICON

The interaction of implantation-induced dislocation loops and interstitials in silicon is studied. Experiments under dry oxidation conditions consistently show a significant reduction of OED (oxidation enhanced diffusion) of boron in a buried layer due to very efficient interstitial capturing action of dislocation loops, suggesting diffusion-limited dislocation loop growth. Simple analytic solution of interstitial supersaturation and analysis of the data in terms of time dependence of the OED suppression demonstrate that the interaction of dislocation loops and interstitials is not a reaction-limited but a diffusion-limited process. Simulations incorporating the model for the interaction mechanism agree with both secondary ion mass spectroscopy and transmission electron spectroscopy data.