DETERMINATION OF DEPOSITION VELOCITY ONTO A WAFER FOR PARTICLES IN THE SIZE RANGE BETWEEN 0.03-MU-M AND 0.8-MU-M

被引：36

作者：

OTANI, Y

EMI, H

KANAOKA, C

KATO, K

机构：

来源：

JOURNAL OF AEROSOL SCIENCE | 1989年 / 20卷 / 07期

关键词：

D O I：

10.1016/0021-8502(89)90090-6

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：787 / 796

页数：10

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