GATED CHROMIUM VOLCANO EMITTERS

被引:16
作者
POGEMILLER, JE
BUSTA, HH
ZIMMERMAN, BJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 02期
关键词
D O I
10.1116/1.587369
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
By reversing the bias of a field emitter with a volcano-shaped gate, it is demonstrated that emission occurs from the rim of the gate. The gate-to-emitter distance of this structure is defined by the thickness of the insulating film between the electrodes and not by expensive photolithographic techniques. By enlarging the gate diameter to printed circuit board-type dimensions, in principle low cost, large area field emitter arrays can be fabricated. The process is being demonstrated on a silicon substrates and initial emission data are being presented. The article concludes by demonstrating one transfer path of this technology onto an inexpensive glass substrate.
引用
收藏
页码:680 / 684
页数:5
相关论文
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