COMPOSITIONAL DEPENDENCE OF THE OPTICAL-PROPERTIES AND THE H LOCAL BONDING IN A-SI1-XGEX-H (X-LESS-THAN-0.4) THIN-FILMS

被引：5

作者：

DIMOVAMALINOVSKA, D ^{[1
]}

NEDIALKOVA, L ^{[1
]}

KUDOYAROVA, V ^{[1
]}

机构：

[1] RUSSIAN ACAD SCI,INST PHYS TECH,ST PETERSBURG,RUSSIA

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 1993年 / 30卷 / 01期

关键词：

D O I：

10.1016/0927-0248(93)90028-2

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

A study on hydrogenated amorphous silicon-germanium alloys is presented. Amorphous thin films are prepared by RF magnetron co-sputtering. The dependence of the optical properties and parameters and the local hydrogen bonding on the composition of a-Si1-xGex:H films (x < 0.4) has been investigated. It is very important to take into account the variation of hydrogen concentration when the influence of Ge content on optical properties and parameters is considered.

引用

页码：27 / 35

页数：9

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