MASS AND ENERGY-DEPENDENCE OF EQUILIBRIUM SURFACE COMPOSITION OF SPUTTERED TANTALUM OXIDE

[1] ELECTRON-BEAM EFFECTS IN DEPTH PROFILING MEASUREMENTS WITH AUGER-ELECTRON SPECTROSCOPY [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (10) : 4581 - 4583

[2] ANDERSEN N, 1975, ATOMIC C SOLIDS, V1, P115

[3] BAY HL, 1977, J APPL PHYS, V48, P11

[4] Coburn J. W., 1974, Critical Reviews in Solid State Sciences, V4, P561, DOI 10.1080/10408437308245843

[5] THE PENETRATION OF POSITIVE IONS OF LOW ENERGY INTO ALLOYS AND COMPOSITION CHANGES PRODUCED IN THEM BY SPUTTERING [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1959, 11 (1-2) : 55 - &

[6] PROBLEM OF WHETHER EXCITED-STATES AMONGST SPUTTERED PARTICLES ARE OF THERMAL ORIGIN [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 35 (03): : 139 - 149

[7] MODEL FOR SURFACE-LAYER COMPOSITION CHANGES IN SPUTTERED ALLOYS AND COMPOUNDS [J]. APPLIED PHYSICS LETTERS, 1977, 31 (04) : 259 - 260

[8] HOTSTON E, 1975, NUCL FUSION, V15, P544, DOI 10.1088/0029-5515/15/3/018

[9] ROLE OF RECOIL IMPLANTATION IN ALTERING STOICHIOMETRY OF A BOMBARDED SOLID [J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F): : 335 - 343

[10] THEORY OF THERMAL SPUTTERING [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 32 (1-2): : 91 - 100

[1] ELECTRON-BEAM EFFECTS IN DEPTH PROFILING MEASUREMENTS WITH AUGER-ELECTRON SPECTROSCOPY [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (10) : 4581 - 4583

[2] ANDERSEN N, 1975, ATOMIC C SOLIDS, V1, P115

[3] BAY HL, 1977, J APPL PHYS, V48, P11

[4] Coburn J. W., 1974, Critical Reviews in Solid State Sciences, V4, P561, DOI 10.1080/10408437308245843

[5] THE PENETRATION OF POSITIVE IONS OF LOW ENERGY INTO ALLOYS AND COMPOSITION CHANGES PRODUCED IN THEM BY SPUTTERING [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1959, 11 (1-2) : 55 - &

[6] PROBLEM OF WHETHER EXCITED-STATES AMONGST SPUTTERED PARTICLES ARE OF THERMAL ORIGIN [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 35 (03): : 139 - 149

[7] MODEL FOR SURFACE-LAYER COMPOSITION CHANGES IN SPUTTERED ALLOYS AND COMPOUNDS [J]. APPLIED PHYSICS LETTERS, 1977, 31 (04) : 259 - 260

[8] HOTSTON E, 1975, NUCL FUSION, V15, P544, DOI 10.1088/0029-5515/15/3/018

[9] ROLE OF RECOIL IMPLANTATION IN ALTERING STOICHIOMETRY OF A BOMBARDED SOLID [J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F): : 335 - 343

[10] THEORY OF THERMAL SPUTTERING [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 32 (1-2): : 91 - 100