INVESTIGATION OF THE THERMALIZATION OF SPUTTERED ATOMS IN A MAGNETRON DISCHARGE USING LASER-INDUCED FLUORESCENCE

被引：15

作者：

PARK, WZ

EGUCHI, T

HONDA, C

MURAOKA, K

YAMAGATA, Y

JAMES, BW

MAEDA, M

AKAZAKI, M

机构：

[1] KYUSHU UNIV,DEPT ELECT ENGN,FUKUOKA 812,JAPAN

[2] KUMAMOTO UNIV,DEPT ELECT ENGN & COMP SCI,KUMAMOTO 860,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1991年 / 58卷 / 22期

关键词：

D O I：

10.1063/1.104827

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The thermalization of sputtered atoms in a magnetron discharge was investigated using laser-induced fluorescence. The results clearly indicated for the first time that the velocity distribution agrees well with the Thompson formula [M. W. Thompson, Philos. Mag. 18, 377 (1968) ] for d/lambda much-less-than 1, while a thermalized component becomes appreciable for d/lambda > 1, where d is the distance from the cathode surface and lambda is the mean free path of sputtered atoms for collisions with filling gas atoms.

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页码：2564 / 2566

页数：3

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共 7 条

[1] AN INTERFEROMETRIC INVESTIGATION OF THE THERMALIZATION OF COPPER ATOMS IN A MAGNETRON SPUTTERING DISCHARGE [J].

BALL, LT ;

FALCONER, IS ;

MCKENZIE, DR ;

SMELT, JM .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (03) :720-724

[2] DETERMINATION OF VELOCITY DISTRIBUTION OF METALLIC ATOMS IN PLASMA-DEVICES WITH A RAPID-FREQUENCY-SCAN DYE-LASER [J].

HONDA, C ;

MAEDA, M ;

NISHIMURA, K ;

MURAOKA, K ;

AKAZAKI, M .

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1984, 33 (03) :171-177

[3] ENERGY-DEPENDENCE OF ANGULAR-DISTRIBUTIONS OF SPUTTERED PARTICLES BY ION-BEAM BOMBARDMENT AT NORMAL INCIDENCE [J].

MATSUDA, Y ;

YAMAMURA, Y ;

UEDA, Y ;

UCHINO, K ;

MURAOKA, K ;

MAEDA, M ;

AKAZAKI, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1986, 25 (01) :8-11

[4] TRANSIENT CHANGE IN THE VELOCITY DISTRIBUTION-FUNCTIONS OF SPUTTERED ATOMS DURING INITIAL DOSE IN ION-BEAM BOMBARDMENT [J].

MATSUDA, Y ;

HONDA, C ;

MATSUBAGUCHI, S ;

MOROISHI, T ;

MURAOKA, K ;

MAEDA, M ;

AKAZAKI, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (03) :L182-L184

[5] SURFACE BINDING-ENERGY OF NICKEL MEASURED BY LASER FLUORESCENCE SPECTROSCOPY [J].

MURAOKA, K ;

SUENAGA, K ;

MORITA, K ;

YAMAGATA, Y ;

KIM, HJ ;

HONDA, C ;

MAEDA, M ;

AKAZAKI, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (03) :561-562

[6] ENERGY SPECTRUM OF EJECTED ATOMS DURING HIGH ENERGY SPUTTERING OF GOLD [J].

THOMPSON, MW .

PHILOSOPHICAL MAGAZINE, 1968, 18 (152) :377-&

[7] MONTE-CARLO CALCULATION OF THE THERMALIZATION OF ATOMS SPUTTERED FROM THE CATHODE OF A SPUTTERING DISCHARGE [J].

TURNER, GM ;

FALCONER, IS ;

JAMES, BW ;

MCKENZIE, DR .

JOURNAL OF APPLIED PHYSICS, 1989, 65 (09) :3671-3679