TRANSIENT CHANGE IN THE VELOCITY DISTRIBUTION-FUNCTIONS OF SPUTTERED ATOMS DURING INITIAL DOSE IN ION-BEAM BOMBARDMENT

被引：21

作者：

MATSUDA, Y ^{[1
]}

HONDA, C ^{[1
]}

MATSUBAGUCHI, S ^{[1
]}

MOROISHI, T ^{[1
]}

MURAOKA, K ^{[1
]}

MAEDA, M ^{[1
]}

AKAZAKI, M ^{[1
]}

机构：

[1] KYUSHU UNIV,FAC ENGN,DEPT ELECT ENGN,FUKUOKA 812,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1986年 / 25卷 / 03期

关键词：

ARGON - ION BEAMS - Applications - LASERS; DYE; -; Applications;

D O I：

10.1143/JJAP.25.L182

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Velocity distribution functions of sputtered iron-atoms under argon-ion bombardment were directly measured with a rapid-frequency-scan dye laser. Each measured profile was fitted with the Thompson formula, and an equivalent surface binding energy was estimated at each ion dose. The surface binding energy thus obtained was near the formation energy or iron in iron oxides at a low ion dose (less than 1 multiplied by 10**1**9 ions/m**2), but approached the sublimation energy of a pure iron above 5 multiplied by 10**1**9 ions/m**2.

引用

页码：L182 / L184

页数：3

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