Several (aryl)trimethylsilane derivatives containing a potentially intramolecularly coordinating dimethylaminomethyl group were prepared and treated with Li2PdCl4 or Pd(OAc)2. Highly selective cleavage of the aryl-C-Si bond took place to give the corresponding arylpalladium complexes. Similar reactions were observed for benzylic trimethylsilyl compounds. The yields of the reactions with Li2PdCl4 varied from 66 to 94%, but yields were >90% when Pd(OAc)2 was used.