A BATCH-FABRICATED SILICON CAPACITIVE PRESSURE TRANSDUCER WITH LOW-TEMPERATURE SENSITIVITY

被引：162

作者：

LEE, YS

WISE, KD

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1982年 / 29卷 / 01期

关键词：

D O I：

10.1109/T-ED.1982.20656

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：42 / 48

页数：7

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