A WATER-AMINE-COMPLEXING AGENT SYSTEM FOR ETCHING SILICON

被引：273

作者：

FINNE, RM

KLEIN, DL

机构：

来源：

关键词：

D O I：

10.1149/1.2426793

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：965 / &

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