METHOD FOR CALIBRATING ANALYSER AND POLARIZER IN AN ELLIPSOMETER

被引：4

作者：

GHEZZO, M

机构：

[1] Research and Development Center, Sprague Electric Company, North Adams, MA

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1969年 / 2卷 / 10期

关键词：

D O I：

10.1088/0022-3727/2/10/420

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A variation of the method developed by McCrackin et al. for calibrating the analyser and the polarizer in an ellipsometer is presented. The new method is useful as an independent check of the results of the former method and as a system for averaging the experimental errors.

引用

页码：1483 / &