ELLIPSOMETRY IN ELECTROCHEMISTRY - A SPECTRUM OF APPLICATIONS

被引：13

作者：

GREEF, R

机构：

[1] Chemistry Department, University of Southampton, Southampton

来源：

THIN SOLID FILMS | 1993年 / 233卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(93)90056-U

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Most electrochemical applications of ellipsometry are dynamic in nature, and this has meant that monochromatic ellipsometry is to date the dominant mode of operation. When measurements can be made in situ, ellipsometry is a powerful and versatile diagnostic tool, and this paper highlights a number of diverse applications to support this view. Examples are given of the kinetics of growth of thick, uniform films, films with a strong gradient of density, very thin films, and nucleating surfaces. Some of the problems that can be met in interpreting ellipsometric results are indicated, with solutions where available. Other optical techniques which can be used as useful adjuncts to ellipsometry are also mentioned.

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页码：32 / 39

页数：8

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