CW AND PULSED UV LASER-INDUCED DEPOSITION FROM CR(CO)6, MO(CO)6, AND W(CO)6

被引：11

作者：

JACKSON, RL

TYNDALL, GW

SATHER, SD

机构：

来源：

APPLIED SURFACE SCIENCE | 1989年 / 36卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(89)90905-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：119 / 133

页数：15

相关论文

共 20 条

[1] ADAMSON AW, 1982, PHYSICAL CHEM SURFAC, P533
[2] AYLETT MR, 1986, CHEMTRONICS, V1, P146
[3] LASER PROJECTION PATTERNED ALUMINUM METALLIZATION FOR INTEGRATED-CIRCUIT APPLICATIONS
BLONDER, GE
HIGASHI, GS
FLEMING, CG
[J]. APPLIED PHYSICS LETTERS, 1987, 50 (12) : 766 - 768
[4] PULSED LASER PHOTOLYSIS OF CHROMIUM HEXACARBONYL IN THE GAS-PHASE
BRECKENRIDGE, WH
STEWART, GM
[J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1986, 108 (03) : 364 - 367
[5] STIMULATED SURFACE-PLASMA-WAVE SCATTERING AND GROWTH OF A PERIODIC STRUCTURE IN LASER-PHOTODEPOSITED METAL-FILMS
BRUECK, SRJ
EHRLICH, DJ
[J]. PHYSICAL REVIEW LETTERS, 1982, 48 (24) : 1678 - 1681
[6] STUDIES ON THE PHOTOCHEMISTRY OF CHROMIUM HEXACARBONYL IN THE GAS-PHASE - PRIMARY AND SECONDARY PROCESSES
FLETCHER, TR
ROSENFELD, RN
[J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1985, 107 (08) : 2203 - 2212
[7] DEPOSITION OF REFRACTORY-METAL FILMS BY RARE-GAS HALIDE LASER PHOTODISSOCIATION OF METAL-CARBONYLS
FLYNN, DK
STEINFELD, JI
SETHI, DS
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (11) : 3914 - 3917
[8] A TIME-RESOLVED TUNABLE DIODE-LASER STUDY OF THE PHOTODISSOCIATION DYNAMICS OF W(CO)6
HOLLAND, JP
ROSENFELD, RN
[J]. CHEMICAL PHYSICS LETTERS, 1988, 145 (06) : 481 - 485
[9] DIRECT OBSERVATION OF THE INTERNAL EXCITATION IN THE PRODUCTS OF THE 2-BODY RECOMBINATION OF CARBON-MONOXIDE AND TUNGSTEN PENTACARBONYL
ISHIKAWA, Y
HACKETT, PA
RAYNER, DM
[J]. CHEMICAL PHYSICS LETTERS, 1988, 145 (05) : 429 - 433
[10] KINETICS AND MECHANISM OF LASER-INDUCED PHOTOCHEMICAL DEPOSITION FROM THE GROUP-6 HEXACARBONYLS
JACKSON, RL
TYNDALL, GW
[J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (04) : 2092 - 2102