DEPOSITION OF REFRACTORY-METAL FILMS BY RARE-GAS HALIDE LASER PHOTODISSOCIATION OF METAL-CARBONYLS

被引：62

作者：

FLYNN, DK

STEINFELD, JI

SETHI, DS

机构：

[1] CONNECTICUT INST TECHNOL,BRIDGEPORT,CT 06601

[2] UNIV BRIDGEPORT,DEPT CHEM,BRIDGEPORT,CT 06602

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 11期

关键词：

D O I：

10.1063/1.336736

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3914 / 3917

页数：4

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