DEPOSITION AND CHARACTERIZATION OF AMORPHOUS-CARBON NITRIDE THIN-FILMS

被引：57

作者：

DEMICHELIS, F ^{[1
]}

RONG, XF ^{[1
]}

SCHREITER, S ^{[1
]}

TAGLIAFERRO, A ^{[1
]}

DEMARTINO, C ^{[1
]}

机构：

[1] SORIN BIOMED SPA, I-13040 SALUGGIA, ITALY

来源：

关键词：

DIAMOND-LIKE FILMS; NITROGEN; ELECTRON PARAMAGNETIC RESONANCE;

D O I：

10.1016/0925-9635(94)05282-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper, a set of amorphous carbon nitride (a-C:N) films with different nitrogen contents were analysed. The most relevant deposition parameter is the nitrogen partial pressure, and the role of nitrogen is to reduce the disordered sp(2) phase and the sp(3)/sp(2) ratio. The origin of the electron spin resonance active centres is identified to be the disordered sp(2) phase.

引用

页码：361 / 365

页数：5

共 17 条

[1] ELECTRICAL-CONDUCTIVITY OF AMORPHOUS-CARBON AND AMORPHOUS HYDROGENATED CARBON
DASGUPTA, D
DEMICHELIS, F
TAGLIAFERRO, A
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1991, 63 (06): : 1255 - 1266
[2] DEMARTINO C, 1994, 4TH P INT C NEW DIAM
[3] NEW APPROACH TO OPTICAL ANALYSIS OF ABSORBING THIN SOLID FILMS
DEMICHELIS, F
KANIADAKIS, G
TAGLIAFERRO, A
TRESSO, E
[J]. APPLIED OPTICS, 1987, 26 (09): : 1737 - 1740
[4] SEARCH FOR CARBON NITRIDE CNX COMPOUNDS WITH A HIGH-NITROGEN CONTENT BY ELECTRON-CYCLOTRON-RESONANCE PLASMA DEPOSITION
DIANI, M
MANSOUR, A
KUBLER, L
BISCHOFF, JL
BOLMONT, D
[J]. DIAMOND AND RELATED MATERIALS, 1994, 3 (03) : 264 - 269
[5] OPTICAL AND ELECTRONIC-PROPERTIES OF NITROGEN-IMPLANTED DIAMOND-LIKE CARBON-FILMS
DOLL, GL
HEREMANS, JP
PERRY, TA
MANTESE, JV
[J]. JOURNAL OF MATERIALS RESEARCH, 1994, 9 (01) : 85 - 90
[6] FORMATION OF CARBON NITRIDE FILMS BY MEANS OF ION ASSISTED DYNAMIC MIXING (IVD) METHOD
FUJIMOTO, F
OGATA, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1993, 32 (3B): : L420 - L423
[7] POSSIBILITY OF CARBON NITRIDE FORMATION BY LOW-ENERGY NITROGEN IMPLANTATION INTO GRAPHITE - IN-SITU ELECTRON-SPECTROSCOPY STUDIES
HOFFMAN, A
GOUZMAN, I
BRENER, R
[J]. APPLIED PHYSICS LETTERS, 1994, 64 (07) : 845 - 847
[8] SYMMETRY-BREAKING IN NITROGEN-DOPED AMORPHOUS-CARBON - INFRARED OBSERVATION OF THE RAMAN-ACTIVE G-BANDS AND D-BANDS
KAUFMAN, JH
METIN, S
SAPERSTEIN, DD
[J]. PHYSICAL REVIEW B, 1989, 39 (18): : 13053 - 13060
[9] LIU AY, 1990, PHYS REV B, V41
[10] CARBON NITRIDE DEPOSITED USING ENERGETIC SPECIES - A 2-PHASE SYSTEM
MARTON, D
BOYD, KJ
ALBAYATI, AH
TODOROV, SS
RABALAIS, JW
[J]. PHYSICAL REVIEW LETTERS, 1994, 73 (01) : 118 - 121

← 1 2 →