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MICROWAVE PLASMAS IN SURFACE-TREATMENT TECHNOLOGIES

被引：3
作者：
DUSEK, V
MUSIL, J
机构：
[1] Institute of Physics, Czechosl. Acad. Sci., Prague 8, 180 40
来源：
CZECHOSLOVAK JOURNAL OF PHYSICS | 1990年 / 40卷 / 11期
关键词：
D O I：
10.1007/BF01605048
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
In this review, basic problems of generating microwave isotropic and anisotropic plasmas are summarized. A brief description of the fundamental types of microwave-plasma-based devices which are used in various surface treatment technologies are given. Their application potentialities and probable directions of future development are discussed. © 1990 Academia, Publishing House of the Czechoslovak Academy of Sciences.
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页码：1185 / 1204
页数：20
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