MODEL OF PREFERENTIAL SPUTTERING OF MULTICOMPONENT MATERIALS INDUCED BY LOW-ENERGY IONS

被引:3
作者
GALKUTE, L
PRANEVICIUS, L
ZUBAUSKAS, G
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关键词
D O I
10.1016/0168-583X(87)90137-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:46 / 48
页数:3
相关论文
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