ENERGY-DEPENDENCE OF THE ION-INDUCED SPUTTERING YIELDS OF MONATOMIC SOLIDS

被引：637

作者：

MATSUNAMI, N ^{[1
]}

YAMAMURA, Y ^{[1
]}

ITIKAWA, Y ^{[1
]}

ITOH, N ^{[1
]}

KAZUMATA, Y ^{[1
]}

MIYAGAWA, S ^{[1
]}

MORITA, K ^{[1
]}

SHIMIZU, R ^{[1
]}

TAWARA, H ^{[1
]}

机构：

[1] NAGOYA UNIV,INST PLASMA PHYS,CHIKUSA KU,NAGOYA,AICHI 464,JAPAN

来源：

关键词：

D O I：

10.1016/0092-640X(84)90016-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];

学科分类号：

070203 ; 070304 ; 081704 ; 1406 ;

摘要：

引用

页码：1 / 80

页数：80

共 173 条

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