DYNAMICS OF SIF4 DESORPTION DURING ETCHING OF SILICON BY XEF2

[1] VELOCITY DISTRIBUTIONS OF AS2 AND AS4 SCATTERED FROM GAAS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 200 - 203

[2] MEASUREMENTS OF SPEED AND SPATIAL DISTRIBUTIONS OF ARSENIC MOLECULES EVAPORATED FROM AN AS (111) CRYSTAL [J]. SURFACE SCIENCE, 1972, 30 (02) : 483 - &

[3] CO-2 PRODUCT VELOCITY DISTRIBUTIONS FOR CO OXIDATION ON PLATINUM [J]. JOURNAL OF CHEMICAL PHYSICS, 1977, 67 (07) : 3394 - 3395

[4] SPATIAL DISTRIBUTIONS OF H2 DESORBED FROM FE, PT, CU, NB, AND STAINLESS-STEEL SURFACES [J]. SURFACE SCIENCE, 1973, 38 (02) : 313 - 326

[5] DETAILED BALANCING AND QUASI-EQUILIBRIUM IN ADSORPTION OF HYDROGEN ON COPPER [J]. SURFACE SCIENCE, 1975, 50 (02) : 263 - 278

[6] INFRARED CHEMI-LUMINESCENCE FROM XEF2-SILICON-SURFACE REACTIONS [J]. PHYSICAL REVIEW LETTERS, 1979, 42 (12) : 815 - 817

[7] ELECTRON-SPECTROSCOPY STUDY OF SILICON SURFACES EXPOSED TO XEF2 AND THE CHEMISORPTION OF SIF4 ON SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (05) : 2614 - 2619

[8] Coburn J.W., 1982, PLASMA CHEM PLASMA P, V2, P1, DOI 10.1007/BF00566856

[9] FAST DEUTERIUM MOLECULES DESORBING FROM METALS [J]. SURFACE SCIENCE, 1980, 95 (01) : L210 - L216

[10] ANGULAR-DEPENDENCE OF FLUX, MEAN ENERGY AND SPEED RATIO FOR D2 MOLECULES DESORBING FROM A NI(111) SURFACE [J]. SURFACE SCIENCE, 1979, 85 (01) : 45 - 68

[1] VELOCITY DISTRIBUTIONS OF AS2 AND AS4 SCATTERED FROM GAAS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 200 - 203

[2] MEASUREMENTS OF SPEED AND SPATIAL DISTRIBUTIONS OF ARSENIC MOLECULES EVAPORATED FROM AN AS (111) CRYSTAL [J]. SURFACE SCIENCE, 1972, 30 (02) : 483 - &

[3] CO-2 PRODUCT VELOCITY DISTRIBUTIONS FOR CO OXIDATION ON PLATINUM [J]. JOURNAL OF CHEMICAL PHYSICS, 1977, 67 (07) : 3394 - 3395

[4] SPATIAL DISTRIBUTIONS OF H2 DESORBED FROM FE, PT, CU, NB, AND STAINLESS-STEEL SURFACES [J]. SURFACE SCIENCE, 1973, 38 (02) : 313 - 326

[5] DETAILED BALANCING AND QUASI-EQUILIBRIUM IN ADSORPTION OF HYDROGEN ON COPPER [J]. SURFACE SCIENCE, 1975, 50 (02) : 263 - 278

[6] INFRARED CHEMI-LUMINESCENCE FROM XEF2-SILICON-SURFACE REACTIONS [J]. PHYSICAL REVIEW LETTERS, 1979, 42 (12) : 815 - 817

[7] ELECTRON-SPECTROSCOPY STUDY OF SILICON SURFACES EXPOSED TO XEF2 AND THE CHEMISORPTION OF SIF4 ON SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (05) : 2614 - 2619

[8] Coburn J.W., 1982, PLASMA CHEM PLASMA P, V2, P1, DOI 10.1007/BF00566856

[9] FAST DEUTERIUM MOLECULES DESORBING FROM METALS [J]. SURFACE SCIENCE, 1980, 95 (01) : L210 - L216

[10] ANGULAR-DEPENDENCE OF FLUX, MEAN ENERGY AND SPEED RATIO FOR D2 MOLECULES DESORBING FROM A NI(111) SURFACE [J]. SURFACE SCIENCE, 1979, 85 (01) : 45 - 68