COMPLEX FLOW PHENOMENA IN MOCVD REACTORS .1. HORIZONTAL REACTORS

[1] BAN VS, 1972, J ELECTROCHEM SOC, V119, P66

[2] Bird R. B., 1960, TRANSPORT PHENOMENA

[3] Chilukuri R., 1980, Numerical Heat Transfer, V3, P169, DOI 10.1080/01495728008961753

[4] A MATHEMATICAL-MODEL OF THE COUPLED FLUID-MECHANICS AND CHEMICAL-KINETICS IN A CHEMICAL VAPOR-DEPOSITION REACTOR [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (02) : 425 - 434

[5] A STAGNANT LAYER MODEL FOR EPITAXIAL GROWTH OF SILICON FROM SILANE IN A HORIZONTAL REACTOR [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (07) : 925 - +

[6] ODE METHODS FOR THE SOLUTION OF DIFFERENTIAL ALGEBRAIC SYSTEMS [J]. SIAM JOURNAL ON NUMERICAL ANALYSIS, 1984, 21 (04) : 716 - 728

[7] GAS-FLOW PATTERNS IN HORIZONTAL EXPITAXIAL REACTOR CELLS OBSERVED BY INTERFERENCE HOLOGRAPHY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (03) : 634 - 644

[8] GRESHO PM, 1981, RECENT ADV NUMERICAL, V1, P27

[9] A FINITE-ELEMENT STUDY OF THE BENARD-PROBLEM USING PARAMETER-STEPPING AND BIFURCATION SEARCH [J]. INTERNATIONAL JOURNAL FOR NUMERICAL METHODS IN FLUIDS, 1984, 4 (02) : 127 - 145

[10] THERMAL-DIFFUSION EFFECTS IN CHEMICAL VAPOR-DEPOSITION REACTORS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (12) : 2911 - 2917

[1] BAN VS, 1972, J ELECTROCHEM SOC, V119, P66

[2] Bird R. B., 1960, TRANSPORT PHENOMENA

[3] Chilukuri R., 1980, Numerical Heat Transfer, V3, P169, DOI 10.1080/01495728008961753

[4] A MATHEMATICAL-MODEL OF THE COUPLED FLUID-MECHANICS AND CHEMICAL-KINETICS IN A CHEMICAL VAPOR-DEPOSITION REACTOR [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (02) : 425 - 434

[5] A STAGNANT LAYER MODEL FOR EPITAXIAL GROWTH OF SILICON FROM SILANE IN A HORIZONTAL REACTOR [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (07) : 925 - +

[6] ODE METHODS FOR THE SOLUTION OF DIFFERENTIAL ALGEBRAIC SYSTEMS [J]. SIAM JOURNAL ON NUMERICAL ANALYSIS, 1984, 21 (04) : 716 - 728

[7] GAS-FLOW PATTERNS IN HORIZONTAL EXPITAXIAL REACTOR CELLS OBSERVED BY INTERFERENCE HOLOGRAPHY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (03) : 634 - 644

[8] GRESHO PM, 1981, RECENT ADV NUMERICAL, V1, P27

[9] A FINITE-ELEMENT STUDY OF THE BENARD-PROBLEM USING PARAMETER-STEPPING AND BIFURCATION SEARCH [J]. INTERNATIONAL JOURNAL FOR NUMERICAL METHODS IN FLUIDS, 1984, 4 (02) : 127 - 145

[10] THERMAL-DIFFUSION EFFECTS IN CHEMICAL VAPOR-DEPOSITION REACTORS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (12) : 2911 - 2917