DIAMOND AND DIAMOND-LIKE FILMS

被引:80
作者
ANGUS, JC
机构
[1] Chemical Engineering Department, Case Western Reserve University, Cleveland
关键词
D O I
10.1016/0040-6090(92)90881-B
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The ability to grow thin films of polycrystalline diamond at atmospheric pressure and below is a relatively new development. This technology, while still immature, has potential electronic applications in thermal management, packaging, lithography and active electronic devices. Non-electronic applications include abrasives, wear resistance surfaces, tool coatings, optical coatings and IR optics. The current status of low pressure diamond growth, and the related field of diamond-like films, will be reviewed and possible future directions indicated.
引用
收藏
页码:126 / 133
页数:8
相关论文
共 51 条
[1]  
ANGUS JC, 1991, ANNU REV MATER SCI, V21, P221
[2]   EMPIRICAL CATEGORIZATION AND NAMING OF DIAMOND-LIKE CARBON-FILMS [J].
ANGUS, JC .
THIN SOLID FILMS, 1986, 142 (01) :145-151
[3]   DENSE DIAMONDLIKE HYDROCARBONS AS RANDOM COVALENT NETWORKS [J].
ANGUS, JC ;
JANSEN, F .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1778-1782
[4]   LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].
ANGUS, JC ;
HAYMAN, CC .
SCIENCE, 1988, 241 (4868) :913-921
[5]  
ANGUS JC, 1989, MRS B OCT, P38
[6]  
ANGUS JC, 1991, 2ND P INT S DIAM DIA
[7]  
ANGUS JC, 1990, SCI TECHNOLOGY NEW D, P9
[8]  
ANGUS JC, 1991, NATO ASI SERIES B
[9]   TOWARDS A GENERAL CONCEPT OF DIAMOND CHEMICAL VAPOR-DEPOSITION [J].
BACHMANN, PK ;
LEERS, D ;
LYDTIN, H .
DIAMOND AND RELATED MATERIALS, 1991, 1 (01) :1-12
[10]  
BACHMANN PK, 1990, MATER RES SOC S P, V165