DIAMOND AND DIAMOND-LIKE FILMS

被引:80
作者
ANGUS, JC
机构
[1] Chemical Engineering Department, Case Western Reserve University, Cleveland
关键词
D O I
10.1016/0040-6090(92)90881-B
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The ability to grow thin films of polycrystalline diamond at atmospheric pressure and below is a relatively new development. This technology, while still immature, has potential electronic applications in thermal management, packaging, lithography and active electronic devices. Non-electronic applications include abrasives, wear resistance surfaces, tool coatings, optical coatings and IR optics. The current status of low pressure diamond growth, and the related field of diamond-like films, will be reviewed and possible future directions indicated.
引用
收藏
页码:126 / 133
页数:8
相关论文
共 51 条
[31]   ELECTRON-MICROSCOPIC OBSERVATION OF DIAMOND PARTICLES GROWN FROM THE VAPOR-PHASE [J].
MATSUMOTO, S ;
MATSUI, Y .
JOURNAL OF MATERIALS SCIENCE, 1983, 18 (06) :1785-1793
[32]  
MOUSTAKAS TD, 1989, NATURE, V342, P786
[33]  
PATEL AR, 1981, INDIAN J PURE APPL P, V119, P903
[34]  
PATEL AR, 1976, J CRYST GROWTH, V46, P706
[35]  
PATTERSON DE, 1990, 2ND P INT C NEW DIAM, P433
[36]   TOPOLOGY OF COVALENT NON-CRYSTALLINE SOLIDS .1. SHORT-RANGE ORDER IN CHALCOGENIDE ALLOYS [J].
PHILLIPS, JC .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1979, 34 (02) :153-181
[37]  
RAVI KV, 1991, 2ND P INT S DIAM DIA
[38]   HARD AMORPHOUS (DIAMOND-LIKE) CARBONS [J].
ROBERTSON, J .
PROGRESS IN SOLID STATE CHEMISTRY, 1991, 21 (04) :199-333
[39]   ELECTRONIC AND ATOMIC-STRUCTURE OF AMORPHOUS-CARBON [J].
ROBERTSON, J ;
OREILLY, EP .
PHYSICAL REVIEW B, 1987, 35 (06) :2946-2957
[40]  
ROBERTSON J, 1986, ADV PHYS, V35, P317, DOI 10.1080/00018738600101911