SHAPE OF THE SURFACE-STEP-DENSITY OSCILLATIONS DURING SPUTTERING OF SINGULAR AND VICINAL SURFACES

被引：20

作者：

SMILAUER, P

WILBY, MR

VVEDENSKY, DD

机构：

[1] UNIV LONDON IMPERIAL COLL SCI TECHNOL & MED,BLACKETT LAB,DEPT PHYS,LONDON SW7 2BZ,ENGLAND

[2] UNIV LONDON UNIV COLL,DEPT ELECT & ELECTR ENGN,LONDON WC1E 7JE,ENGLAND

来源：

PHYSICAL REVIEW B | 1993年 / 48卷 / 07期

关键词：

D O I：

10.1103/PhysRevB.48.4968

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The evolution of the morphology of sputtered surfaces has been investigated using computer simulations of a solid-on-solid model. We have studied the close analogy between growth and sputtering and found two phenomena which have not yet been observed experimentally: the asymmetric shape of the surface-step-density oscillations, and the delay of the first maximum in both the step density and the kinematic intensity oscillations during sputtering of vicinal surfaces. We have found that the asymmetric shape of the step density oscillations during sputtering is due to coalescence phenomena.

引用

收藏

页码：4968 / 4971

页数：4

相关论文

共 18 条

[1] ANISOTROPIC VACANCY KINETICS AND SINGLE-DOMAIN STABILIZATION ON SI(100)-2X1 [J].

BEDROSSIAN, P ;

KLITSNER, T .

PHYSICAL REVIEW LETTERS, 1992, 68 (05) :646-649

[2] SURFACE RECONSTRUCTION IN LAYER-BY-LAYER SPUTTERING OF SI(111) [J].

BEDROSSIAN, P ;

KLITSNER, T .

PHYSICAL REVIEW B, 1991, 44 (24) :13783-13786

[3] LAYER-BY-LAYER SPUTTERING AND EPITAXY OF SI(100) [J].

BEDROSSIAN, P ;

HOUSTON, JE ;

TSAO, JY ;

CHASON, E ;

PICRAUX, ST .

PHYSICAL REVIEW LETTERS, 1991, 67 (01) :124-127

[4] ORIGIN OF REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION INTENSITY OSCILLATIONS DURING MOLECULAR-BEAM EPITAXY - A COMPUTATIONAL MODELING APPROACH [J].

CLARKE, S ;

VVEDENSKY, DD .

PHYSICAL REVIEW LETTERS, 1987, 58 (21) :2235-2238

[5] TIME-RESOLVED X-RAY-SCATTERING STUDIES OF LAYER-BY-LAYER EPITAXIAL-GROWTH [J].

FUOSS, PH ;

KISKER, DW ;

LAMELAS, FJ ;

STEPHENSON, GB ;

IMPERATORI, P ;

BRENNAN, S .

PHYSICAL REVIEW LETTERS, 1992, 69 (19) :2791-2794

[6]

HAIDER N, UNPUB

[7] MANY-BODY EFFECTS ON CALCULATED DEFECT PROPERTIES IN HCP METALS [J].

JOHNSON, RA .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1991, 63 (05) :865-872

[8] MORPHOLOGICAL EFFECTS INDUCED BY THE FORMATION OF A PT-ADATOM LATTICE GAS ON PT(111) [J].

MICHELY, T ;

LAND, T ;

LITTMARK, U ;

COMSA, G .

SURFACE SCIENCE, 1992, 272 (1-3) :204-210

[9] 2-LAYER BEHAVIOR OF THE PT(111) SURFACE DURING LOW-ENERGY AR+-ION SPUTTERING AT HIGH-TEMPERATURES [J].

POELSEMA, B ;

VERHEIJ, LK ;

COMSA, G .

PHYSICAL REVIEW LETTERS, 1984, 53 (26) :2500-2503

[10] ON THE SHAPE OF THE IN-PHASE TEAS OSCILLATIONS DURING EPITAXIAL-GROWTH OF PT(111) [J].

POELSEMA, B ;

BECKER, AF ;

ROSENFELD, G ;

KUNKEL, R ;

NAGEL, N ;

VERHEIJ, LK ;

COMSA, G .

SURFACE SCIENCE, 1992, 272 (1-3) :269-275