Plasma production by helicon waves

被引：164

作者：

Shoji, T. ^{[1
]}

Sakawa, Y. ^{[1
]}

Nakazawa, S. ^{[1
]}

Kadota, K. ^{[1
]}

Sato, T. ^{[1
]}

机构：

[1] Nagoya Univ, Ctr Plasma Sci, Nagoya, Aichi 46401, Japan

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 1993年 / 2卷 / 01期

关键词：

D O I：

10.1088/0963-0252/2/1/002

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

High density plasma production using m = +1 and m = -1 helicon waves is studied. Characteristics of cylindrical helicon waves including effects of a vacuum gap between the plasma and the conducting wall and of a non-uniform density profile are presented. The m = +1 and m = -1 helicon modes are separately excited by a helical antenna, and the dependences of plasma density and antenna loading resistance on RF power are shown to be different for these modes.

引用

页码：5 / 10

页数：6

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