MULTIPOLE CONFINED DIFFUSION PLASMA PRODUCED BY 13.56 MHZ ELECTRODELESS SOURCE

被引：56

作者：

BOSWELL, RW

PERRY, AJ

EMAMI, M

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.576148

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

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页码：3345 / 3350

页数：6

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共 14 条

[1] PLASMA-ETCHING IN MAGNETIC MULTIPOLE MICROWAVE-DISCHARGE
ARNAL, Y
PELLETIER, J
POMOT, C
PETIT, B
DURANDET, A
[J]. APPLIED PHYSICS LETTERS, 1984, 45 (02) : 132 - 134
[2] SOME FEATURES OF RF EXCITED FULLY IONIZED LOW-PRESSURE ARGON PLASMA
BOSWELL, R
PORTEOUS, R
PRYTZ, A
BOUCHOULE, A
RANSON, P
[J]. PHYSICS LETTERS A, 1982, 91 (04) : 163 - 166
[3] ETCHING IN A PULSED PLASMA
BOSWELL, RW
PORTEOUS, RK
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (08) : 3123 - 3129
[4] CHABERT P, 1983, VIDE COUCHES MINCE S, V218, P25
[5] CHEN F, 1974, INTRO PLASMA PHYSICS
[6] SILANE DISSOCIATION MECHANISMS AND THIN-FILM FORMATION IN A LOW-PRESSURE MULTIPOLE DC DISCHARGE
DREVILLON, B
HUC, J
LLORET, A
PERRIN, J
DEROSNY, G
SCHMITT, JPM
[J]. APPLIED PHYSICS LETTERS, 1980, 37 (07) : 646 - 648
[7] IMPROVED SOURCE OF COLD-PLASMA ELECTRONS AND NEGATIVE-IONS
HERSHKOWITZ, N
INTRATOR, T
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1981, 52 (11) : 1629 - 1633
[8] MAGNETIC MULTIPOLE CONTAINMENT OF LARGE UNIFORM COLLISIONLESS QUIESCENT PLASMAS
LIMPAECHER, R
MACKENZIE, KR
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (06) : 726 - 731
[9] PLASMA-ETCHING WITH SURFACE MAGNETIC-FIELD CONFINEMENT
MANTEI, TD
WICKER, T
[J]. APPLIED PHYSICS LETTERS, 1983, 43 (01) : 84 - 86
[10] NONRESONANT COUPLING OF ION-ACOUSTIC WAVES IN 3 DIMENSIONS
MANTEI, TD
MATTHIEUSSENT, G
[J]. PHYSICS OF FLUIDS, 1977, 20 (06) : 1005 - 1012