PLASMA-ETCHING WITH SURFACE MAGNETIC-FIELD CONFINEMENT

[1] CHAPMAN B, 1980, GLOW DISCHARGE PROCE, P70

[2] Chapman B. N., 1980, GLOW DISCHARGE PROCE, P143

[3] COBINE JD, 1958, GASEOUS CONDUCTORS, P139

[4] SILANE DISSOCIATION MECHANISMS AND THIN-FILM FORMATION IN A LOW-PRESSURE MULTIPOLE DC DISCHARGE [J]. APPLIED PHYSICS LETTERS, 1980, 37 (07) : 646 - 648

[5] NOTES ON EFFECT OF NOISE ON LANGMUIR PROBE CHARACTERISTICS [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1962, 79 (509): : 535 - &

[6] ISAACSON GC, 1976, AIAA761045 PAP

[7] OPTIMIZATION OF PERMANENT-MAGNET PLASMA CONFINEMENT [J]. PHYSICS LETTERS A, 1975, A 51 (08) : 490 - 492

[8] LIMPAECHER K, 1973, REV SCI INSTRUM, V44, P926

[9] NONRESONANT COUPLING OF ION-ACOUSTIC WAVES IN 3 DIMENSIONS [J]. PHYSICS OF FLUIDS, 1977, 20 (06) : 1005 - 1012

[10] MANTEI TD, UNPUB J ELECTROCHEM

[1] CHAPMAN B, 1980, GLOW DISCHARGE PROCE, P70

[2] Chapman B. N., 1980, GLOW DISCHARGE PROCE, P143

[3] COBINE JD, 1958, GASEOUS CONDUCTORS, P139

[4] SILANE DISSOCIATION MECHANISMS AND THIN-FILM FORMATION IN A LOW-PRESSURE MULTIPOLE DC DISCHARGE [J]. APPLIED PHYSICS LETTERS, 1980, 37 (07) : 646 - 648

[5] NOTES ON EFFECT OF NOISE ON LANGMUIR PROBE CHARACTERISTICS [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1962, 79 (509): : 535 - &

[6] ISAACSON GC, 1976, AIAA761045 PAP

[7] OPTIMIZATION OF PERMANENT-MAGNET PLASMA CONFINEMENT [J]. PHYSICS LETTERS A, 1975, A 51 (08) : 490 - 492

[8] LIMPAECHER K, 1973, REV SCI INSTRUM, V44, P926

[9] NONRESONANT COUPLING OF ION-ACOUSTIC WAVES IN 3 DIMENSIONS [J]. PHYSICS OF FLUIDS, 1977, 20 (06) : 1005 - 1012

[10] MANTEI TD, UNPUB J ELECTROCHEM