SPATIALLY-RESOLVED STUDIES OF THE MICROWAVE PROPERTIES OF SUPERCONDUCTING DEVICES

被引：13

作者：

QUENTER, D

STEHLE, S

DODERER, T

KRULLE, CA

HUEBENER, RP

MULLER, F

NIEMEYER, J

POPEL, R

WEIMANN, T

RUBY, R

BARFKNECHT, AT

机构：

[1] PHYS TECH BUNDESANSTALT,W-3300 BRAUNSCHWEIG,GERMANY

[2] HEWLETT PACKARD CORP,PALO ALTO,CA 94303

[3] CONDUCTUS INC,SUNNYVALE,CA 94086

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 15期

关键词：

D O I：

10.1063/1.110564

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Low temperature scanning electron microscopy (LTSEM) offers the possibility for spatially resolved investigations of microwave properties of single Josephson junctions, superconducting striplines, resonators, and complex cryoelectric circuits during their operation. The spatial resolution of about 1 mum is at least two orders of magnitude better than the typical wavelength (> 100 mum in the elements) in the frequency range of interest (50-500 GHz). We demonstrate that LTSEM is a well suited tool for the experimental investigation of superconducting microwave devices and cryoelectronic circuits.

引用

页码：2135 / 2137

页数：3

共 14 条

[1] A SIMPLE AND ROBUST NIOBIUM JOSEPHSON JUNCTION INTEGRATED-CIRCUIT PROCESS [J].