NITRIDATION OF SI(111) BY NITROGEN-ATOMS

被引:90
作者
SCHROTT, AG
FAIN, SC
机构
关键词
D O I
10.1016/0039-6028(81)90473-8
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:39 / 52
页数:14
相关论文
共 25 条
  • [1] KINETIC-ENERGY DEPENDENCE OF THE REACTIONS OF N+ AND N2(+) WITH MOLYBDENUM
    BALDWIN, DA
    MURRAY, PT
    RABALAIS, JW
    [J]. CHEMICAL PHYSICS LETTERS, 1981, 77 (02) : 403 - 404
  • [2] BLAKELY JM, 1973, INTRO PROPERTIES CRY, V12
  • [3] ATOMIC AND ELECTRONIC-STRUCTURE OF THE 7X7 RECONSTRUCTED SI(111) SURFACE
    CHADI, DJ
    BAUER, RS
    WILLIAMS, RH
    HANSSON, GV
    BACHRACH, RZ
    MIKKELSEN, JC
    HOUZAY, F
    GUICHAR, GM
    PINCHAUX, R
    PETROFF, Y
    [J]. PHYSICAL REVIEW LETTERS, 1980, 44 (12) : 799 - 802
  • [4] NITRIDATION OF SILICON (111) - AUGER AND LEED RESULTS
    DELORD, JF
    SCHROTT, AG
    FAIN, SC
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 517 - 520
  • [5] EASTMAN DE, 1979, I PHYS C SER, V43, pCH28
  • [6] ERTL G, 1974, LOW ENERGY ELECTRONS
  • [7] COMPARISON OF BACKSCATTERING INTENSITIES FOR LOW-ENERGY ELECTRONS FROM VARIOUS SURFACE ATOMS (H,LI,BE,C,O,AL,SI,S,V,CR,NI,CU,AG,PT,AU)
    FINK, M
    SOMORJAI, GA
    MARTIN, MR
    [J]. SURFACE SCIENCE, 1972, 29 (01) : 303 - &
  • [8] Fink M, 1972, ATOM DATA, V4, P129
  • [9] STUDY OF NITRIDATION OF SILICON SURFACES BY LOW-ENERGY ELECTRON-DIFFRACTION AND AUGE ELECTRON SPECTROSCOPY
    HECKINGBOTTOM, R
    WOOD, PR
    [J]. SURFACE SCIENCE, 1973, 36 (02) : 594 - 605
  • [10] HECKINGBOTTOM R, 1969, STRUCTURE CHEM SOLID