NITRIDATION OF SILICON (111) - AUGER AND LEED RESULTS

[1] EMISSIVITY AT 0.65 MICRON OF SILICON AND GERMANIUM AT HIGH TEMPERATURES [J]. JOURNAL OF APPLIED PHYSICS, 1957, 28 (12) : 1510 - 1511

[2] STUDY OF NITRIDATION OF SILICON SURFACES BY LOW-ENERGY ELECTRON-DIFFRACTION AND AUGE ELECTRON SPECTROSCOPY [J]. SURFACE SCIENCE, 1973, 36 (02) : 594 - 605

[3] HECKINGBOTTOM R, 1969, STRUCTURE CHEM SOLID

[4] HECKINGBOTTOM R, 1977, J ELECTROCHEM SOC, V124, P419

[5] HOFMANN S, 1974, POWDER METALL INT, V6, P90

[6] QUANTITATIVE DETECTION OF OXYGEN IN SILICON-NITRIDE ON SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (05) : 723 - 728

[7] CHEMICAL-SHIFTS IN AUGER-ELECTRON SPECTRA FROM SILICON IN SILICON-NITRIDE [J]. SURFACE SCIENCE, 1976, 54 (02) : 506 - 508

[8] VERY THIN SILICON-NITRIDE FILMS GROWN BY DIRECT THERMAL-REACTION WITH NITROGEN [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (03) : 448 - 452

[9] MOLECULAR-STRUCTURE, MICROSTRUCTURE, MACROSTRUCTURE AND PROPERTIES OF SILICON-NITRIDE [J]. INORGANICA CHIMICA ACTA, 1976, 20 (02) : 167 - 181

[10] AUGER DEPTH PROFILING OF MNOS STRUCTURES BY ION SPUTTERING [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1977, 24 (05) : 547 - 551

[1] EMISSIVITY AT 0.65 MICRON OF SILICON AND GERMANIUM AT HIGH TEMPERATURES [J]. JOURNAL OF APPLIED PHYSICS, 1957, 28 (12) : 1510 - 1511

[2] STUDY OF NITRIDATION OF SILICON SURFACES BY LOW-ENERGY ELECTRON-DIFFRACTION AND AUGE ELECTRON SPECTROSCOPY [J]. SURFACE SCIENCE, 1973, 36 (02) : 594 - 605

[3] HECKINGBOTTOM R, 1969, STRUCTURE CHEM SOLID

[4] HECKINGBOTTOM R, 1977, J ELECTROCHEM SOC, V124, P419

[5] HOFMANN S, 1974, POWDER METALL INT, V6, P90

[6] QUANTITATIVE DETECTION OF OXYGEN IN SILICON-NITRIDE ON SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (05) : 723 - 728

[7] CHEMICAL-SHIFTS IN AUGER-ELECTRON SPECTRA FROM SILICON IN SILICON-NITRIDE [J]. SURFACE SCIENCE, 1976, 54 (02) : 506 - 508

[8] VERY THIN SILICON-NITRIDE FILMS GROWN BY DIRECT THERMAL-REACTION WITH NITROGEN [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (03) : 448 - 452

[9] MOLECULAR-STRUCTURE, MICROSTRUCTURE, MACROSTRUCTURE AND PROPERTIES OF SILICON-NITRIDE [J]. INORGANICA CHIMICA ACTA, 1976, 20 (02) : 167 - 181

[10] AUGER DEPTH PROFILING OF MNOS STRUCTURES BY ION SPUTTERING [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1977, 24 (05) : 547 - 551