CHEMICAL-SHIFTS IN AUGER-ELECTRON SPECTRA FROM SILICON IN SILICON-NITRIDE

被引：51

作者：

HOLLOWAY, PH ^{[1
]}

机构：

[1] SANDIA LABS,ALBUQUERQUE,NM 87115

来源：

关键词：

D O I：

10.1016/0039-6028(76)90240-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：506 / 508

页数：3

共 8 条

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[3] HOLLOWAY PH, TO BE PUBLISHED
[4] HOUSTON JE, 1974, J VAC SCI TECHNOL, V12, P255
[5] MAGUIRE HG, 1975, J ELECTROCHEM SOC, V119, P791
[6] THEORY OF KLL AUGER ENERGIES INCLUDING STATIC RELAXATION
SHIRLEY, DA
[J]. PHYSICAL REVIEW A, 1973, 7 (05): : 1520 - 1528
[7] STRAUSSER YE, 1975, 4 ARPA NBS WORKSH SU
[8] ELECTRON-IRRADIATION EFFECT IN AUGER ANALYSIS OF SIO2
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[J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (01) : 161 - 166