QUALITATIVE-ANALYSIS OF ARSINE BY SEALED INDUCTIVELY COUPLED PLASMA ATOMIC EMISSION-SPECTROMETRY

被引：18

作者：

JACKSIER, T

BARNES, RM

机构：

[1] Department of Chemistry, Lederle Graduate Research Center, University of Massachusetts, Amherst

来源：

JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY | 1992年 / 7卷 / 06期

关键词：

SEALED DISCHARGE; STATIC PLASMA; ARSINE ANALYSIS; INDUCTIVELY COUPLED PLASMA ATOMIC EMISSION SPECTROMETRY;

D O I：

10.1039/ja9920700839

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Parameter optimization of a sealed inductively coupled plasma and the qualitative analysis of arsine are described. The choice and role of an additive gas, effect of flow rate, discharge container size and geometry, r.f. power and signal reproducibility are discussed. The qualitative determination of C, Fe, Ge, Mg, Mo, Ni, Sn and V impurities in arsine is established.

引用

页码：839 / 844

页数：6

共 22 条

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