TEMPERATURE-TIME TEXTURE TRANSITION OF PB(ZR1-XTIX)O-3 THIN-FILMS .1. ROLE OF PB-RICH INTERMEDIATE PHASES

被引:208
作者
CHEN, SY
CHEN, IW
机构
[1] Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan
关键词
D O I
10.1111/j.1151-2916.1994.tb04602.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Lead-rich intermediate phases, in particular Pt5-7Pb and PbO, are found to form on Pt(lll) atop Ti-buffered Si substrates prior to formation of Pb(Zr1-xTix)O-3 (PZT) thin films. Pt5-7Pb is a [111] textured transient intermetallic phase that nucleates PZT[111] texture. PbO is a [001] textured layer compound that nucleates PZT[100] texture. The formation conditions and lattice matching of these intermediate phases have been examined. The presence of other possible intermediate phases, such as pyrochlore and Zr and Ti-rich phases, has also been investigated but found unrelated to the texture selection of perovskite PZT.
引用
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页码:2332 / 2336
页数:5
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