MEASUREMENT OF NEGATIVE-IONS USING IMPROVED PROBE FOR DETECTION OF PHOTODETACHED ELECTRONS

被引:1
作者
MATSUYAMA, M
HIROSAWA, A
MATSUMURA, S
机构
[1] Department of Electrical and Electronic Engineering, Musashi Institute of Technology
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 7B期
关键词
NEGATIVE ION MEASUREMENT; PHOTODETACHMENT; COMPENSATION PROBE METHOD; CARBON-COATED PROBE; PROCESSING PLASMA;
D O I
10.1143/JJAP.33.4312
中图分类号
O59 [应用物理学];
学科分类号
摘要
Negative ion measurement applying an electrostatic probe to detect photodetached electrons in noisy plasma has been performed using a compensation circuit with an additional probe. The detected photodetachment current is dependent on the probe surface material. A carbon-coated probe yields the best results in reproducibility and sensitivity in our experiments. The time response of photodetached electron current caused by laser irradiation has also been monitored. The transient current is two to three orders of magnitude larger than the steadystate current at the instant the laser is turned on. Therefore, the absolute determination of steadystate photodetachment current using laser light chopping and the lock-in amplifier is unreliable.
引用
收藏
页码:4312 / 4315
页数:4
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