SPUTTERING OF AMORPHOUS CO-ZR AND CO-HF FILMS WITH SOFT MAGNETIC-PROPERTIES

被引：75

作者：

SHIMADA, Y

KOJIMA, H

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 04期

关键词：

D O I：

10.1063/1.331013

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：3156 / 3160

页数：5

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