CHARGE NEUTRALIZATION OF INSULATING SURFACES IN THE SEM BY GAS IONIZATION

被引:88
作者
MONCRIEFF, DA [1 ]
ROBINSON, VNE [1 ]
HARRIS, LB [1 ]
机构
[1] UNIV NEW S WALES,FAC APPL SCI,KENSINGTON 2033,NEW S WALES,AUSTRALIA
关键词
D O I
10.1088/0022-3727/11/17/002
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:2315 / 2325
页数:11
相关论文
共 15 条
[1]  
BISHOP HE, 1965, 4TH P INT C XRAY OPT, P1953
[2]  
CROWTHER JA, 1949, IONS ELECTRONS IONIS, P6
[3]  
ENGEL AV, 1965, IONIZED GASES, pCH3
[4]   HIGH-RESOLUTION EXAMINATION OF UNCOATED INSULATORS BY SEM APPLIED TO GRAIN-BOUNDARIES IN SODIUM-CHLORIDE [J].
HARRIS, LB ;
MONCRIEFF, DA ;
ROBINSON, VNE .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1976, 35 (01) :371-377
[5]  
KOLLATH R, 1947, ANN PHYS-BERLIN, V1, P357
[6]  
MONCRIEFF DA, UNPUBLISHED
[7]   DIRECT OBSERVATION OF INSULATORS WITH A SCANNING ELECTRON-MICROSCOPE [J].
MORIN, P ;
PITAVAL, M ;
VICARIO, E .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1976, 9 (11) :1017-1020
[8]   SECONDARY-ELECTRON EMISSION OF 10-100 KEV ELECTRONS FROM TRANSPARENT FILMS OF AL AND AU [J].
REIMER, L ;
DRESCHER, H .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1977, 10 (05) :805-815
[9]   CONSTRUCTION AND USES OF AN EFFICIENT BACKSCATTERED ELECTRON DETECTOR FOR SCANNING ELECTRON-MICROSCOPY [J].
ROBINSON, VN .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1974, 7 (08) :650-652
[10]   REAPPRAISAL OF COMPLETE ELECTRON-EMISSION SPECTRUM IN SCANNING ELECTRON-MICROSCOPY [J].
ROBINSON, VN .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1973, 6 (12) :L105-&