THE ROLE OF NOBLE-GAS ION-BOMBARDMENT IN ETCHING REACTIONS

[1] Andersen H. H., 1973, Radiation Effects, V19, P139, DOI 10.1080/00337577308232233

[2] BAHRISCH EL, 1985, J APPL PHYS, V57, P336

[3] BALLER T, UNPUB APPL PHYS LETT

[4] CHINN JD, 1985, J VAC SCI TECHNOL B, V13, P410

[5] PLASMA-ETCHING - DISCUSSION OF MECHANISMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 391 - 403

[6] ION-ASSISTED AND ELECTRON-ASSISTED GAS-SURFACE CHEMISTRY - IMPORTANT EFFECT IN PLASMA-ETCHING [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (05) : 3189 - 3196

[7] MAGNETICALLY SUSPENDED CROSS-CORRELATION CHOPPER IN MOLECULAR BEAM-SURFACE EXPERIMENTS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1981, 52 (06) : 789 - 797

[8] EXPERIMENTAL-EVIDENCE FOR THE ABSENCE OF LOCAL THERMAL-EQUILIBRIUM IN CHEMICAL SPUTTERING [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 809 - 813

[9] DIELEMAN J, 1985, J VAC SCI TECHNOL B, V3, P1984

[10] ION-ENHANCED GAS-SURFACE CHEMISTRY - THE INFLUENCE OF THE MASS OF THE INCIDENT ION [J]. SURFACE SCIENCE, 1981, 103 (01) : 177 - 188

[1] Andersen H. H., 1973, Radiation Effects, V19, P139, DOI 10.1080/00337577308232233

[2] BAHRISCH EL, 1985, J APPL PHYS, V57, P336

[3] BALLER T, UNPUB APPL PHYS LETT

[4] CHINN JD, 1985, J VAC SCI TECHNOL B, V13, P410

[5] PLASMA-ETCHING - DISCUSSION OF MECHANISMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 391 - 403

[6] ION-ASSISTED AND ELECTRON-ASSISTED GAS-SURFACE CHEMISTRY - IMPORTANT EFFECT IN PLASMA-ETCHING [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (05) : 3189 - 3196

[7] MAGNETICALLY SUSPENDED CROSS-CORRELATION CHOPPER IN MOLECULAR BEAM-SURFACE EXPERIMENTS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1981, 52 (06) : 789 - 797

[8] EXPERIMENTAL-EVIDENCE FOR THE ABSENCE OF LOCAL THERMAL-EQUILIBRIUM IN CHEMICAL SPUTTERING [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 809 - 813

[9] DIELEMAN J, 1985, J VAC SCI TECHNOL B, V3, P1984

[10] ION-ENHANCED GAS-SURFACE CHEMISTRY - THE INFLUENCE OF THE MASS OF THE INCIDENT ION [J]. SURFACE SCIENCE, 1981, 103 (01) : 177 - 188