DEPOSITION OF ZRO2 AND Y2O3-STABILIZED ZRO2 FROM BETA-DIKETONATES

被引：22

作者：

PULVER, M ^{[1
]}

WAHL, G ^{[1
]}

SCHEYTT, H ^{[1
]}

SOMMER, M ^{[1
]}

机构：

[1] ASEA BROWN BOVERI AG,CRH,D-69123 HEIDELBERG,GERMANY

来源：

JOURNAL DE PHYSIQUE IV | 1993年 / 3卷 / C3期

关键词：

D O I：

10.1051/jp4:1993342

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The deposition of ZrO2 and Y2O3-stabilized ZrO2 from metalorganic beta-diketonates by CVD and the evaporation behaviour of those precursors was investigated. Evaporation and deposition processes were correlated with fluiddynamical calculations and found to be in good agreement. The calculations also show that much higher growth rates than achieved until now could be expected (i.e. >1 mum/min).

引用

页码：305 / 312

页数：8

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