THE 1ST OBSERVATION OF RHEED INTENSITY OSCILLATION DURING THE GROWTH OF A METAL METAL MULTILAYERED FILM BY MBE AND THE ELECTRICAL-RESISTIVITY MEASUREMENT OF MO/AL MULTILAYERED FILMS GROWN BY RF-SPUTTERING

被引：4

作者：

DOYAMA, M ^{[1
]}

YAMAMOTO, R ^{[1
]}

KANEKO, T ^{[1
]}

IMAFUKU, M ^{[1
]}

KOKUBU, C ^{[1
]}

IZUMIYA, T ^{[1
]}

HANAMURE, T ^{[1
]}

机构：

[1] UNIV TOKYO,FAC ENGN,ENGN RES INST,BUNKYO KU,TOKYO 113,JAPAN

来源：

关键词：

D O I：

10.1016/0042-207X(86)90138-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：909 / 911

页数：3

共 8 条

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