CHEMICAL VAPOR-DEPOSITION OF SINGLE-CRYSTALLINE ZNO FILM WITH SMOOTH SURFACE ON INTERMEDIATELY SPUTTERED ZNO THIN-FILM ON SAPPHIRE

被引：35

作者：

OHNISHI, S ^{[1
]}

HIROKAWA, Y ^{[1
]}

SHIOSAKI, T ^{[1
]}

KAWABATA, A ^{[1
]}

机构：

[1] KYOTO UNIV,FAC ENGN,DEPT ELECTR,KYOTO 606,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1978年 / 17卷 / 05期

关键词：

D O I：

10.1143/JJAP.17.773

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：773 / 778

页数：6

共 24 条

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[8]

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