ZINC-OXIDE THIN-FILM SURFACE-WAVE TRANSDUCERS

被引：94

作者：

HICKERNELL, FS ^{[1
]}

机构：

[1] MOTOROLA INC,DIV GOVT ELECTR,SCOTTSDALE,AZ 85252

来源：

PROCEEDINGS OF THE IEEE | 1976年 / 64卷 / 05期

关键词：

D O I：

10.1109/PROC.1976.10187

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：631 / 635

页数：5

共 23 条

[1]

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[5] C-AXIS ORIENTATION OF SPUTTERED ZNO FILMS [J].

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[6]

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[7] CRYSTALLOGRAPHIC ORIENTATION OF ZINC OXIDE FILMS DEPOSITED BY TRIODE SPUTTERING [J].

FOSTER, NF .

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[8] ZINC OXIDE FILM TRANSDUCERS - (PIEZOELECTRICS - ULTRASONICS - TRANSDUCERS - EFFICIENCY - E) [J].

FOSTER, NF ;

ROZGONYI, GA .

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[9] STRUCTURES AND ELECTRICAL PROPERTIES OF ZINC OXIDE FILMS PREPARED BY LOW PRESSURE SPUTTERING SYSTEM [J].

HADA, T ;

WASA, K ;

HAYAKAWA, S .

THIN SOLID FILMS, 1971, 7 (02) :135-&

[10] MICROSTRUCTURE OF ZNO FILMS USED FOR ACOUSTIC SURFACE-WAVE GENERATION [J].

HICKERNELL, FS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (04) :879-883

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