Co/Pt multilayered films were evaporated on glass substrates that were heated up to 500-degrees-C. Perpendicular magnetic anisotropy K(perpendicular-to) was found to increase with the elevation of substrate temperature T(s), reaching a maximum at T(s) = 300-degrees-C. The surface anisotropy component also increased with elevating T(s) while the volume component hardly depended on T(s). The coercivity of the perpendicular magnetization curve, H(c perpendicular-to), greatly increased with the elevation of T(s) , exceeding 4 kOe at T(s) = 300 and 400-degrees-C. The layered structure was found to deteriorate considerably at T(s) = 300-degrees-C, becoming indistinct at T(s) = 400-degrees-C and higher. On the other hand, the (111) preferred orientation normal to the film plane became more pronounced with the elevation of T(s). The average grain size [d(g)] was found to increase with the elevation of T(s). It was also found that H(c perpendicular-to) had a close relationship to [d(g)], reaching a maximum at [d(g)] = 250-300 angstrom.