EFFECT OF ENERGETIC BOMBARDMENT ON THE MAGNETIC COERCIVITY OF SPUTTERED PT/CO THIN-FILM MULTILAYERS

被引:67
作者
CARCIA, PF [1 ]
SHAH, SI [1 ]
ZEPER, WB [1 ]
机构
[1] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS
关键词
D O I
10.1063/1.102912
中图分类号
O59 [应用物理学];
学科分类号
摘要
Pt/Co multilayers are an attractive candidate for a magneto-optical recording medium. However, films sputter deposited in Ar have coercivities too small (100-350 Oe) to be practical in recording. By sputter depositing multilayers in Kr or Xe instead of Ar, we achieved coercivities ∼1000 Oe, suitable for recording. We attribute the lower coercivity of Ar-sputtered films to interfacial mixing of Pt and Co layers by energetic bombardment from Ar gas atoms that recoil from the Pt target.
引用
收藏
页码:2345 / 2347
页数:3
相关论文
共 12 条
[1]   A MONTE-CARLO COMPUTER-PROGRAM FOR THE TRANSPORT OF ENERGETIC IONS IN AMORPHOUS TARGETS [J].
BIERSACK, JP ;
HAGGMARK, LG .
NUCLEAR INSTRUMENTS & METHODS, 1980, 174 (1-2) :257-269
[3]   PERPENDICULAR MAGNETIC-ANISOTROPY IN PD/CO THIN-FILM LAYERED STRUCTURES [J].
CARCIA, PF ;
MEINHALDT, AD ;
SUNA, A .
APPLIED PHYSICS LETTERS, 1985, 47 (02) :178-180
[4]  
CARCIA PF, 1989, MATER RES SOC S P, V150, P115
[5]   EFFECTS OF ANNEALING AND ION-IMPLANTATION ON THE MAGNETIC-PROPERTIES OF PD/CO MULTILAYERS CONTAINING ULTRATHIN CO [J].
DENBROEDER, FJA ;
KUIPER, D ;
DRAAISMA, HJG .
IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (05) :3696-3698
[6]   MAGNETIC INTERFACE ANISOTROPY IN PD/CO AND PD/FE MULTILAYERS [J].
DRAAISMA, HJG ;
DEJONGE, WJM ;
DENBROEDER, FJA .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1987, 66 (03) :351-355
[7]  
Hartmann M., 1985, Philips Technical Review, V42, P37
[8]  
Maissel L.I., 1970, HDB THIN FILM TECHNO
[9]   THERMALIZATION OF SPUTTERED ATOMS [J].
MEYER, K ;
SCHULLER, IK ;
FALCO, CM .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (09) :5803-5805
[10]   MAGNETO-OPTICAL PROPERTIES IN ULTRATHIN CO/PD AND CO/PT MULTILAYER FILMS [J].
OCHIAI, Y ;
HASHIMOTO, S ;
ASO, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1989, 28 (04) :L659-L660